Gate insulator loss free etch-stop oxide thin film transistor

ABSTRACT

A method is provided for fabricating a thin-film transistor (TFT). The method includes forming a semiconductor layer over a gate insulator that covers a gate electrode, and depositing an insulator layer over the semiconductor layer, as well as etching the insulator layer to form a patterned etch-stop without losing the gate insulator. The method also includes forming a source electrode and a drain electrode over the semiconductor layer and the patterned etch-stop. The method further includes removing a portion of the semiconductor layer beyond the source electrode and the drain electrode such that a remaining portion of the semiconductor layer covers the gate insulator in a first overlapping area of the source electrode and the gate electrode and a second overlapping area of the drain electrode and gate electrode.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.13/629,537, filed Sep. 27, 2012, entitled “Gate Insulator Loss FreeEtch-Stop Oxide Thin Film Transistor,” which claims the benefit under 35U.S.C. §1.119(e) to U.S. Provisional Application No. 61/682,161, filedAug. 10, 2012, entitled “Gate Insulator Loss Free Etch-Stop Oxide ThinFilm Transistor,” both of which are incorporated by reference as iffully disclosed herein.

TECHNICAL FIELD

The present invention generally relates to oxide thin film transistor(TFT) for a liquid crystal display. More specifically, the inventionrelates to an TFT with a semiconductor indium-gallium-zinc-oxide (IGZO).

BACKGROUND

Liquid crystal displays (LCDs) generally display images by transmittingor blocking light through the action of liquid crystals. LCDs have beenused in a variety of computing displays and devices, including notebookcomputers, desktop computers, tablet computing devices, mobile phones(including smart phones) automobile in-cabin displays, on appliances, astelevisions, and so on. LCDs often use an active matrix to drive liquidcrystals in a pixel region. In some LCDs, a thin-film transistor (TFT)is used as a switching element in the active matrix.

FIG. 1A illustrates a perspective view of a sample electronic device,such as a tablet computer. The electronic device includes a touch screendisplay 100 enclosed by a housing 138. The touch screen display 100Aincorporates a cover glass 102 and an LCD 100B behind the cover glass102, although alternative embodiments may employ an organiclight-emitting display (OLED) layer instead of an LCD. The LCD 100B isnot shown in FIG. 1A.

SUMMARY

Embodiments described herein may provide an oxide thin-film transistor(TFT) for a liquid crystal display (LCD). The TFT may include asemiconductor extension, such as an indium-gallium-zinc oxide (IGZO)extension. The semiconductor extension is configured to protect a gateinsulator from loss during etching of the etch-stop (ES). Specifically,the semiconductor extension is configured such that a source electrodeor a drain electrode does not contact the gate insulator in anoverlapping area of the gate electrode and source electrode and in anoverlapping area of the gate electrode and drain electrode. The IGZO iszinc oxide based and contains indium and gallium.

During processing, the IGZO extension covers the gate insulator in theoverlapping areas between the gate electrode and the source electrodeand also between the gate electrode and drain electrode, such that theIGZO extension protects the gate insulator during etching of the ES fromloss. This absence of gate insulator loss may help reduce thicknessvariation in the gate insulator and thus capacitance variation betweenthe gate and the source electrodes, and also capacitance variationbetween the gate and the drain electrodes. The disclosure also providesmethods for fabricating the TFT with the semiconductor extension or IGZOextension.

In one embodiment, a method is provided for fabricating a thin-filmtransistor (TFT). The method includes forming a semiconductor layer overa gate insulator that covers a gate electrode, and depositing aninsulator layer over the semiconductor layer, as well as etching theinsulator layer to form a patterned etch-stop without losing the gateinsulator. The method also includes forming a source electrode and adrain electrode over the semiconductor layer and the patternedetch-stop. The method further includes removing a portion of thesemiconductor layer beyond the source electrode and the drain electrodesuch that a remaining portion of the semiconductor layer covers the gateinsulator in a first overlapping area of the source electrode and thegate electrode and a second overlapping area of the drain electrode andgate electrode.

In another embodiment, a thin film transistor (TFT) is provided. The TFTincludes a gate electrode disposed over a substrate, a gate insulatordisposed over the gate electrode, and a semiconductor layer disposedover the gate insulator. The TFT also includes an insulator formed overthe semiconductor layer. The TFT further includes a source electrodehaving a first portion covering a first portion of the insulator and adrain electrode having a first portion covering a second portion of theinsulator. The semiconductor layer is configured to extend outwardlyfrom the insulator layer and to cover the gate insulator to prevent fromloss of the gate insulator during an etching of the insulator layer.

Additional embodiments and features are set forth in part in thedescription that follows, and in part will become apparent to thoseskilled in the art upon examination of the specification or may belearned by the practice of the invention. A further understanding of thenature and advantages of the present invention may be realized byreference to the remaining portions of the specification and thedrawings, which forms a part of this disclosure.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A illustrates a perspective view of an IPAD.

FIG. 1B shows an exploded perspective view of the liquid crystal display(prior art).

FIG. 2 shows a plan view of the pixel region of FIG. 1B, including asample TFT.

FIG. 3 shows an exploded cross-sectional view of the sample TFT of FIG.2.

FIG. 4 shows a cross-sectional view of an ES deposition with gateinsulator loss.

FIG. 5A illustrates a plan view of a pixel region with a TFT in anembodiment.

FIG. 5B illustrates a cross-sectional view of the TFT area of FIG. 5A.

FIG. 6A shows a cross-sectional view of a gate deposition and an IGZOdeposition in an embodiment.

FIG. 6B shows a cross-sectional view of an ES deposition in anembodiment.

FIG. 6C illustrates a plan view of the pixel region after the operationillustrated in FIG. 6B.

FIG. 6D shows a sample cross-sectional view of a source/drain depositionfollowing the operation illustrated in FIG. 6B.

FIG. 6E shows a sample cross-sectional view of the TFT after completingthe etching operation by the fourth patterned photoresist of FIG. 6D.

FIG. 6F shows a sample cross-sectional view of a first passivationdeposition, an organic insulator deposition, and a common electrodedeposition following the operation illustrated in FIG. 6D.

FIG. 6G shows a sample cross-sectional view of a second passivationdeposition and a pixel electrode deposition following the operationillustrated in FIG. 6F.

DETAILED DESCRIPTION

The present disclosure may be understood by reference to the followingdetailed description, taken in conjunction with the drawings asdescribed below. It is noted that, for purposes of illustrative clarity,certain elements in various drawings may not be drawn to scale.

The present disclosure provides a TFT with a semiconductor extension oran IGZO extension for protecting the gate insulator (GI) from lossduring etching. The reduction in gate insulator loss may help minimizecapacitance variations in the TFT area. The TFT also includes anetch-stop layer which covers an entire aperture area to help improveoptical uniformity.

FIG. 1B shows an exploded perspective view of a sample liquid crystaldisplay 100B (prior art), as may be used with the sample computingdevice of FIG. 1A. The liquid crystal display 100B may include a colorfilter substrate 152, an array substrate 144, and a liquid crystal layer146 between the color substrate 152 and the array substrate 144,although some embodiments may omit or change the orders of one or moreof these layers. A number of sub-color filters 158 may include red,green and blue colors, and may be arranged on the color filter substrate152. A black matrix 156 may also be arranged on the color substrate 152to divide the sub-color filters 158. Some embodiments may replace one ormore of the red, green and blue filters with a yellow filter, a cyanfilter, a clear filter, or another color filter. Further, the number ofcolor filters and their arrangement may vary in certain embodiments.

There are a number of gate lines 150 and data lines 148 arrangedhorizontally and vertically to define a pixel region 140. The pixelregion 140 may be generally rectangular in shape or square in shape.Still other embodiments may have differently-shaped pixel regions.

Returning to FIG. 1B, each pixel region 140 has a TFT area 142 locatedat its corner (as indicated by the circled region). The TFT area 142switches a respective pixel for each pixel region 140 on and off. Thepixel regions 140 are arranged on the array substrate 144, which may beformed of a glass. Each pixel region 140 also includes a liquid crystallayer 146. Typically, there is a unique pixel electrode 160 for eachpixel region 140. A common electrode 154 may be attached to the colorfilter substrate 152. A voltage between the pixel electrode 160 and thecommon electrode 154 may be applied to the liquid crystal layer 146 foreach pixel region 140. The voltage may control the alignment of liquidcrystal molecules in the liquid crystal layer 146 and to control lighttransmission for each pixel of the LCD.

FIG. 2 shows a plan view of a sample TFT. The pixel region 140 includesan active area (also referred to herein as an “aperture area”) 202 abovea dash-line and the TFT area 142 below the dash-line. In the active area202, a gate insulator layer may be inadvertently thinned too much duringmanufacture, thus resulting in variations in thickness across the pixelor between pixels, which in turn may create an optical non-uniformityacross the LCD. In the TFT area 142, this gate insulator loss may resultin a variance in capacitance between the gate electrode 214 and thesource electrode 208A, and/or a variance in capacitance between the gateelectrode 214 and the drain electrode 208B.

The thickness of the gate insulator layer may vary during an etchingprocess implemented to form an etch-stop 206A between the source 208Aand drain 208B. The gate insulator loss may cover part or all of theentire active area or aperture area 202 and also a large portion of theTFT area 142, except the etch-stop 206A. The etch-stop 206A is in arectangular shape oriented vertically, although it may have othershapes. The etch-stop 206A overlaps with a portion of a source electrodeor region 208A and a drain electrode or region 208B. A semiconductorlayer 212 is also shown in a rectangular shape oriented horizontally,which overlaps with a portion of the source region 208A and drain region208B, as well as etch-stop 206A. The semiconductor layer 212 may beformed of indium-gallium-zinc-oxide (IGZO) or others and the like.

A data line 148A may be connected to source region or electrode 208A, asshown in FIG. 2. A gate line 150 may be connected to gate electrode orregion 214. This connection is not shown in this view of FIG. 2. Thedata line 148A and gate line 150 may be connected to multiple TFTs asshown in FIG. 1B. Data line 148B is for a neighboring TFT.

FIG. 3 shows an exploded cross-sectional view of a sample TFT, such asthat depicted in FIG. 2. The TFT area 142 includes gate electrode 204disposed over a substrate 144, a source electrode 208A and a drainelectrode 208B. The TFT area 142 also includes a gate insulator 302disposed over the gate electrode 204, a semiconductor layer, such asIGZO 212, over the gate insulator 302 and an etch-stop 206A over theIGZO 212. The etch-stop 206A is positioned to separate the sourceelectrode 208A and the drain electrode 208B. The IGZO 212 extends beyondthe etch-stop 206A sideway and connects to both the source electrode208A and the drain electrode 208B. The TFT area 142 also includes aplanarization layer 304 over the source electrode 208A and drainelectrode 208B. The TFT area 142 further includes a common electrode 306for all pixels. The common electrode 306 is disposed over theplanarization layer 304. The TFT area 142 also includes a pixelelectrode 310, and a passivation layer 308 that separates the commonelectrode 306 from the pixel electrode 310. The planarization layer 304may be formed of an organic insulator, such as a photoactive compound(PAC) and may provide a flat surface for forming more layers, such asforming the common electrode 306 and the pixel electrode 310 amongothers. The pixel electrode 310 may be connected to the drain electrode208B or source electrode 208A (not shown). The source and drainelectrodes may be interchangeable.

FIG. 4 shows a cross-sectional view of an ES deposition for forming theetch-stop of FIG. 3 with gate insulator loss, as the arrows A-A in FIG.2 illustrate where the cross-section is. The etching process for formingthe etch-stop may result in a gate insulator loss. As shown, the gateelectrode 204 may be formed on a portion of the substrate 144. The gateinsulator 302 may cover the gate electrode 204. The semiconductor suchas IGZO 212 may be deposited on the gate insulator 302 in the regionabove the gate electrode 204. An etch-stop (ES) layer 206 may bedisposed over the IGZO 212. The ES stop layer 206 may be formed of aninsulator, such as SiO₂, and the like. Then, a photoresist layer 314 isdisposed over the ES layer 206 to cover a portion 206A of the etch-stoplayer 206. A remaining portion 206B of the ES layer 206 is not coveredby the photoresist 314 and so is exposed. The exposed ES portion 206Bmay be removed by etching. During the etching, the gate insulator 302may be removed along with the etch-stop 206B, because it is difficult todistinguish the etch-stop 206B from the gate insulator 302 that is belowthe etch-stop 206B. This difficulty arises since the gate insulator 302may be formed of similar materials to the ES 206. Thus, as one example,the gate insulator 302 may be etched away down to the dashed line 316,rather than leaving the entirety of the gate insulator intact(represented by line 318). The difference between the lines 316 and 318is referred as “gate insulator loss.”

FIG. 5A illustrates a plan view of a pixel region with a TFT inaccordance with a sample embodiment. An entire pixel region 500 includesa pixel area 500A above a dash-line and a TFT area 500B below thedash-line. The TFT area 500B includes an IGZO extension that preventsthe gate insulator loss during an etching process for the etch-stop. Anetch-stop (ES) layer 502 may cover the entire pixel region 500 excepttwo etch-stop holes 506A-B, illustrated by lines contoured 514A and514B, respectively. For example, the etch-stop layer 502 may be in arectangular shape as shown. In addition, a gate electrode 504 may alsobe rectangular-shaped and may overlap with a source electrode 508A and adrain electrode 508B. The source and drain electrodes 508A and 508B maybe separated by ES 502. The two ES holes 506A-B as contoured by lines514A and 514B may overlap at least portions of the source electrode 508Aand drain electrode 508B. A portion of the etch-stop layer 502 ispositioned between the source electrode 508A and the drain electrode508B. The etch-stop 502 may help improve optical uniformity in the pixelarea or aperture area 500A, as the etch-stop may minimize gate insulatorloss in the pixel area 500A. It will be appreciated by those skilled inthe art that the source and drain electrodes 508A and 508B may beinterchangeable.

A semiconductor layer may be placed under the ES layer 502. In aparticular embodiment, the semiconductor layer may be anindium-gallium-zinc-oxide (IGZO). The IGZO has a relatively highmobility, such as 1-100 cm²/Vs, compared to an amorphous siliconthin-film transistor. In addition, the IGZO may be opticallytransparent. The semiconductor layer, such as IGZO layer, overlaps witha larger portion of the source and drain electrodes 508A and 508B thanthe ES 502. Specifically, an IGZO extension 512 may be under the ES 502between the source and drain electrodes 508A and 508B. A portion of theIGZO extension 512 positioned under the ES 502 may have the same orsimilar surface area as the ES 502. The IGZO extension 512 may alsoinclude a first overlapping area 510A between source 508A and gate 504,and a second overlapping area 510B between drain 508B and gate 504 (seeFIG. 5A). The first and second overlapping areas 510A-B are on the twoends of the ES 502. Because the IGZO extension 512 covers theoverlapping area 510A and 510B, there is little or no gate insulatorloss in these areas.

The IGZO may be replaced by other semiconductor materials in someembodiments. It will be appreciated by those skilled in the art that thesemiconductor layer may include or incorporate other materials, forexample, zinc oxide (ZnO), indium oxide (InO), gallium oxide (GaO), tinoxide (SnO2), indium gallium oxide (IGO), indium zinc oxide (IZO), zinctin oxide (ZTO), and indium zinc tin oxide (IZTO) among others.

As shown in FIG. 5A, a first data line 532A may be connected to sourceelectrode 508A. A second data line 532B may be connected to aneighboring source electrode (not shown). A gate line 530 may beconnected to gate electrode 504, although this connection is not shownin this view. This gate line 530 and first data line 532A may havesimilar functions to the vertical and horizontal gate lines 150 and datalines 148 shown in FIG. 1B.

FIG. 5B illustrates a cross-sectional view of the TFT area 500B of FIG.5A as the arrows B-B shown in FIG. 5A illustrate where the cross-sectionis. The TFT area 500B includes a gate electrode 504, a source electrode508A, and a drain electrode 508B. The TFT 500B also includes aplanarization layer 526, a common electrode 518, a pixel electrode 520,and a passivation layer 522 that separates the common electrode 518 fromthe pixel electrode 520. The planarization layer 526 may be formed of anorganic insulator, such as PAC Planarization layer 526 may be formed ofan inorganic material, such as silicon nitride (Si₃N₄), and an organicmaterial, such as acrylate, and/or an organic-inorganic hybrid likesiloxane. The planarization layer may provide a flat surface for formingmore layers, including the common electrode 518 and the pixel electrode520. The PAC has relatively low dielectric constant, often considerablylower than the passivation layer 522. The pixel electrode 520 may beconnected to the drain electrode 508B.

Referring to FIG. 5A again, the data line 532A and the gate line 530 maybe controlled by a controller for an LCD (not shown) to change the “on”and “off” states of the TFT. Referring to FIG. 5B now, the pixelelectrode 520 may be connected to the drain electrode 508B. A controlsignal is generated from the TFT, such that a voltage between the pixelelectrode 520 and the common electrode 518 may be applied to therespective pixel.

The common electrode 518 and the pixel electrode 520 may be formed of atransparent conductive material, such as indium-tin oxide (ITO). Thepassivation layer 522 may be formed of a dielectric material. Forexample, SiNx may be used for forming the passivation layer 522, sinceSiNx has relatively high dielectric constant. Because of the highdielectric constant, SiNx, when used as a passivation layer 522, mayprovide a better capacitance match to the capacitor formed between thecommon electrode 518 and the pixel electrode 520.

As shown in FIG. 5B, the gate electrode 504 may be formed on thesubstrate 524. The substrate 524 may be transparent. The IGZO 512 mayextend to cover the gate insulator 516 to protect the gate insulator 516from loss during etching of the etch-stop layer to form the etch-stop502. The source and drain layers 508A and 508B are separated from thegate insulator 516 in the overlapping area of the gate electrode withthe source and drain electrodes (between two vertical dash-lines in FIG.5B). This separation is different from the IGZO 206A arrangement asshown in FIG. 3A, where the IGZO 206A does not extend outwardly, and sothe source and drain 208A-B contact the gate insulator 302 in theoverlapping area of the gate with the source and the drain (between twovertical lines in FIG. 3). The gate electrode 504, source electrode 508Aand the drain electrode 508B may be formed of a conductive materialhaving low electrical resistance, such as copper or aluminum and thelike.

FIGS. 6A-6B, and FIG. 6C-6G illustrate various cross-sectional views ofdifferent operations of a mask process that may form a TFT structure fora pixel of an LCD, in accordance with an embodiment. Initially, FIG. 6Aillustrates a cross-sectional view of a gate deposition and an IGZOdeposition in an embodiment. A first patterned photoresist for the gateelectrode is not shown in FIG. 6A. A first mask is used to form thefirst patterned photoresist is also not shown in FIG. 6A for simplicity.

Generally, a photoresist film may be made of a photosensitive material;exposure to light (or particular wavelengths of light) to develop thephotoresist. The developed photoresist may be insoluble or soluble to adeveloper. There may be two types of photoresist, a positive photoresistand a negative photoresist. The positive photoresist is soluble to thephotoresist developer. The portion of the positive photoresist that isunexposed remains insoluble to the photoresist developer. The negativeresist is a type of photoresist in which the portion of the photoresistthat is exposed to light becomes insoluble to the photoresist developer.The unexposed portion of the photoresist is dissolved by the photoresistdeveloper.

In embodiments disclosed below, a photoresist is first deposited on asurface, and then light is selectively passed through a patterned maskthat may block light in certain areas. The exposed photoresist film isdeveloped through the patterned mask to form the photoresist patterns asshown. The exposed photoresist film protects the layers underneathduring an etching process, such that the portion exposed by thephotoresist may be completely removed by the etching process, such as awet etching. Portions of underlying layers that are protected byphotoresist generally are not removed or otherwise etched. After etchingto form a pattern of a deposited layer by using photoresist, theinsoluble photoresist is removed prior to the next deposition operation.Different masks may be provided to form various films with differentpatterns. In alternative embodiments, different photoresist may be used.

As shown in FIG. 6A, a second patterned photoresist 602 covers a portionof an IGZO layer 612. The IGZO layer 612 may be deposited over a gateinsulator layer 516, which covers a gate electrode 504. The secondpatterned photoresist 602 is developed and protects the portion of theIGZO layer 612 underneath during etching to form an IGZO 606. Theexposed portion or non-covered portion of the IGZO layer 612 will beremoved by the etching. The remaining portion 606 of the IGZO layer 612is shown in FIG. 6B. The second patterned photoresist 602 may be removedafter the etching of the IGZO prior to the next deposition operation.

FIG. 6B shows a sample cross-sectional view of an ES deposition layerfollowing the operation illustrated in FIG. 6A. FIG. 6B shows that athird patterned photoresist 604 may be placed on an etch-stop layer 502which is deposited on top of the remaining portion 606 of the IGZO layer612. The third patterned photoresist 604 is formed by a third mask (notshown) with a predetermined pattern. The third patterned photoresist 604covers a portion of the etch-stop layer 502.

Next, an etching operation removes the exposed etch-stop layer 502 toform ES 610, which is a remaining portion of ES 502 under the thirdpatterned photoresist 604. After the etching operation using the thirdpatterned photoresist 604, the etching holes 514A-B are formed. Duringetching of the ES layer 502, the IGZO layer 606 protects the gateinsulator 516 from loss.

FIG. 6C illustrates a simplified plan view of the pixel region aftercompleting etching with the third patterned photoresist. As shown, an ESlayer 502 covers the entire pixel region except two ES holes illustratedby contoured dash-lines 514A and 514B. A semiconductor layer 606, suchas IGZO layer, may fill the ES holes 514A-B to protect the gateinsulator from loss during the etching of the ES. An ES portion 610 maybe formed between the two ES holes 514A-B in the gate electrode 504. Thesemiconductor 606, such as IGZO layer, is also underneath the ES portion610, which is shown more clearly in FIG. 6D below. A gate line 530 maybe connected to the gate electrode 504 (not shown).

FIG. 6D shows a sample cross-sectional view of a source and draindeposition and a fourth mask to form a fourth patterned photoresistfollowing the operation as illustrated in FIG. 6B. As shown in FIG. 6D,a source/drain layer 618 may be disposed over the ES 610 and an exposedportion of the remaining IGZO layer 606, or a portion is not covered bythe ES 610. A fourth patterned photoresist 614 covers a portion of thesource and drain layer 618. The exposed portions of the source and drainlayer 618 (e.g., the portions not covered by the fourth patternedphotoresist 614) are etched away to form source 618A and drain 618B.Likewise, the etching operation also removes the exposed portion of theIGZO 606 to form IGZO section 616, which is a remaining portion underthe photoresist 614.

FIG. 6E shows a cross-sectional view of the TFT after another etchingoperation. Note that the source and drain 618A and 618B are formedpartially on top of the etch-stop 610 and partially on top of apatterned IGZO layer 616. The vertical edges of the source and drain618A-Bare substantially aligned with the vertical edges of thesemiconductor layer 616. Referring to FIG. 5A again, the remaining IGZOportion 616 includes IGZO 510A and IGZO 510B in the ES holes after theetching operation with the fourth patterned photoresist 614. Theremaining portion 616 also includes an IGZO portion located under the ES502 and is similar to IGZO 512 (see FIG. 5B).

Referring to FIG. 6D again, edge 1 is defined by the fourth patternedphotoresist 614 while edge 2 is defined by the ES 610. Even though edge1 looks apparently parallel to edge 2 as shown in FIG. 6D, edge 1 isactually substantially perpendicular to the edge 2 as shown in FIG. 5A.Referring to FIG. 5A again, edge 1 is substantially parallel to a Y-axisand edge 2 is substantially parallel to an X-axis which is perpendicularto the Y-axis. This is because the layout to the right side of the edge2 in FIG. 6D is actually rotated by about 90 degrees from the layout tothe left side of the edge 2. This rotation permits depiction of the ES610 and other layers to the right side of edge 2 in the same view as thelayout to the left side of the edge 2. Thus, to the right side of edge2, the cross-section is taken along line C-C shown in FIG. 5A.

FIG. 6F shows a sample cross-sectional view of a first passivationdeposition, an organic insulator deposition, and a common electrodedeposition following the operation illustrated in FIG. 6D. As shown, afirst passivation layer 620 may be disposed over the source and drainregions 618A-B and the ES 610. Then, an organic insulator 622 may bedisposed over the first passivation layer 620. A fifth mask (not shown)may be used to form a via hole 628 above the first passivation layer 620by etching or lithography to remove the material in the via hole 628. Acommon electrode layer 624 may be deposited over the organic insulator622. A sixth mask (not shown) may be used to form the patterned commonelectrode 624 by etching to remove a portion of the electrode layer aspredetermined by the mask. This common electrode 624 has a similarfunction to the common electrode 154 shown in FIG. 1B.

FIG. 6G shows an example cross-sectional view of a second passivationdeposition and a pixel electrode deposition following the operationillustrated in FIG. 6F. A second passivation layer 632 may be disposedover the common electrode 624 and the organic insulator 622. A seventhmask (not shown) may be used to form a via hole 630 through the secondpassivation layer 632, similar to forming the via hole 628. A pixelelectrode layer is then deposited over the second passivation layer andthe via hole 630. An eighth mask (not shown) may be used to form apatterned pixel electrode 626, similar to forming the common electrode624. This pixel electrode 626 has similar function to the pixelelectrode 160 as shown in FIG. 1B.

The first passivation layer 620 may be formed of an insulator such assilicon oxide (SiO2), among others. The second passivation layer 632 mayalso be formed of an insulator, such silicon nitride (SiNx) amongothers. The common electrode 624 and the pixel electrode 626 may beformed of a transparent conductor, such as indium-tin oxide (ITO),indium zinc oxide (IZO) and others. The organic insulator may includephoto inactive or photo active polymer. Furthermore, the photoactivecompound (PAC) may be positive tone or negative tone material. Thepolymer bases may be acrylate, cyclic olefine polymer, and/or siloxane,among others. The IGZO 616 has a relatively high mobility and isoptically transparent. The IGZO 616 may also be formed by a reactivesputtering method or a pulsed laser deposition (PLD) method, and thelike. The gate insulator 516 may be formed of an inorganic insulatorfilm including silicon oxide (SiO₂), silicon nitride (SiN_(x)), adielectric oxide film such as aluminum oxide (Al₂O₃), or an organicmaterial, and the like. The gate insulator 516 may be formed by achemical vapor deposition (CVD) method using a plasma enhanced chemicalvapor deposition system or formed by a physical vapor method using asputtering system. Other deposition processes may also or alternativelybe used.

The gate insulator 516 may include multiple layers of the abovematerials. For example, the gate insulator 516 may include one or moreinsulation layers. In a particular embodiment, the gate insulator 516may have a two-layer structure. A silicon nitride layer may be formed asa first insulating layer and a silicon oxide layer may be formed as asecond insulating layer. This gate insulator 516 may prevent an impuritysuch as moisture or alkali metal or copper contamination from diffusinginto a TFT element and a display device and may also improve reliabilityof a semiconductor element formed in an element formation layer, or thelike.

The TFT with a semiconductor extension or an IGZO extension may be usedfor a conventional liquid crystal display, any other liquid crystaldisplays which may vary in color filter/liquid crystal layout orconfiguration, or organic light-emitting display (OLED). The TFT may beused for a touch screen display that includes a touch panel with theliquid crystal display.

Having described several embodiments, it will be recognized by thoseskilled in the art that various modifications, alternativeconstructions, and equivalents may be used without departing from thespirit of the invention. Additionally, a number of well-known processesand elements have not been described in order to avoid unnecessarilyobscuring the present invention. Accordingly, the above descriptionshould not be taken as limiting the scope of the invention.

Those skilled in the art will appreciate that the presently disclosedembodiments teach by way of example and not by limitation. Therefore,the matter contained in the above description or shown in theaccompanying drawings should be interpreted as illustrative and not in alimiting sense. The following claims are intended to cover all genericand specific features described herein, as well as all statements of thescope of the present method and system, which, as a matter of language,might be said to fall therebetween.

What is claimed is:
 1. A method of fabricating a thin-film transistor(TFT), the method comprising: forming a semiconductor layer over a gateinsulator that covers a gate electrode; depositing an insulator layerover the semiconductor layer; etching the insulator layer to form apatterned etch-stop without losing the gate insulator; forming a sourceelectrode and a drain electrode over the semiconductor layer and thepatterned etch-stop; and removing a portion of the semiconductor layerbeyond the source electrode and the drain electrode such that aremaining portion of the semiconductor layer covers the gate insulatorin a first overlapping area of the source electrode and the gateelectrode and a second overlapping area of the drain electrode and gateelectrode.
 2. The method of claim 1, wherein the semiconductor layercomprises an oxide semiconductor selected from a group consisting ofindium-gallium-zinc-oxide (IGZO), zinc oxide (ZnO), indium oxide (InO),gallium oxide (GaO), tin oxide (SnO2), indium gallium oxide (IGO),indium zinc oxide (IZO), zinc tin oxide (ZTO), and indium zinc tin oxide(IZTO).
 3. The method of claim 1, wherein the gate insulator comprisesone or more layers of one or more dielectric materials, each materialbeing selected from a group consisting of silicon oxide (SiO₂), siliconnitride (SiN_(x)), aluminum oxide (Al₂O₃), and organic material.
 4. Themethod of claim 1, wherein each of the gate electrode, the sourceelectrode, and the drain electrode comprises one or more layers of aconductive material selected from a group consisting of copper, copperalloy, aluminum, aluminum alloy, titanium, and molybdenum.
 5. The methodof claim 1, wherein the gate electrode is formed on a substrate thatcomprises a glass.
 6. The method of claim 1, wherein the insulator layercomprises a material selected from a group consisting of silicon oxideand aluminum oxide.